JPS63111979U - - Google Patents
Info
- Publication number
- JPS63111979U JPS63111979U JP402287U JP402287U JPS63111979U JP S63111979 U JPS63111979 U JP S63111979U JP 402287 U JP402287 U JP 402287U JP 402287 U JP402287 U JP 402287U JP S63111979 U JPS63111979 U JP S63111979U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- liquid supply
- tip nozzle
- constant temperature
- temperature water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 239000012774 insulation material Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987004022U JPH0520469Y2 (en]) | 1987-01-14 | 1987-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987004022U JPH0520469Y2 (en]) | 1987-01-14 | 1987-01-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111979U true JPS63111979U (en]) | 1988-07-19 |
| JPH0520469Y2 JPH0520469Y2 (en]) | 1993-05-27 |
Family
ID=30784313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987004022U Expired - Lifetime JPH0520469Y2 (en]) | 1987-01-14 | 1987-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0520469Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02258082A (ja) * | 1988-12-20 | 1990-10-18 | Tokyo Electron Ltd | 塗布装置及び塗布方法 |
| JP2016111132A (ja) * | 2014-12-04 | 2016-06-20 | 東京エレクトロン株式会社 | 処理液供給管、処理液供給装置及び液処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5670869A (en) * | 1979-11-14 | 1981-06-13 | Hitachi Ltd | Spinner coating apparatus |
-
1987
- 1987-01-14 JP JP1987004022U patent/JPH0520469Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5670869A (en) * | 1979-11-14 | 1981-06-13 | Hitachi Ltd | Spinner coating apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02258082A (ja) * | 1988-12-20 | 1990-10-18 | Tokyo Electron Ltd | 塗布装置及び塗布方法 |
| JP2016111132A (ja) * | 2014-12-04 | 2016-06-20 | 東京エレクトロン株式会社 | 処理液供給管、処理液供給装置及び液処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0520469Y2 (en]) | 1993-05-27 |